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Gas Measured Nitrogen Trifluoride (NF3) Cartridge Part Number MIDAS-S-XHF 1 year standard warranty MIDAS-E-XHF 2 year extended warranty Sensor Technology 3 electrode electrochemical cell Measuring Range (ppm) NF3 0 - 40 ppm Minimum Alarm 1 Set Point 4.0ppm Repeatability < ± 10% of measured value Linearity < ± 20% of measured value Response Time t 62.5 < 110 seconds Sensor Cartridge Life Expectancy ≥ 24 months under typical application conditions Operating Temperature 0°C to +40°C (32°F to 104°F) Effect of Temperature < ± 0.002ppm / °C (at 0°C to 20°C) Zero < ± 0.008ppm / °C (at 20°C to 40°C) Sensitivity < ± 0.4% of measured value / °C Operating Humidity (continuous) 20 – 75% rH 1 Effect of Humidity Zero < ± 0.003ppm / % rH Sensitivity < ± 1% of measured value / % rH Operating Pressure 90 - 110kPa Effect of Position No effect in typical application Long Term Drift Zero No drift Sensitivity < 15% of measured value / year Calibration Gas Hydrogen Fluroide (HF) Challenge Gas (Bump Test) Chlorine (Cl2 ) Warm Up Time < 20 minutes Storage Temperature +5°C to +25°C (+41°F to +77°F)

所列傳感器數(shù)據(jù)基于理想的測(cè)試環(huán)境；觀察到的性能可能因

實(shí)際監(jiān)測(cè)系統(tǒng)和采用的采樣條件。

三氟化氮傳感器盒需要單獨(dú)的熱解器模塊（MIDAS-T-NP1）

發(fā)現(xiàn)

每6個(gè)月進(jìn)行一次氣體校準(zhǔn)，并確保安裝點(diǎn)的恒溫

NF3通過(guò)熱擊穿。為了保持規(guī)定的性能，建議執(zhí)行

50-104華氏度（10-40攝氏度），濕度為30-70%相對(duì)濕度。

否則，需要更頻繁的碰撞測(cè)試或振動(dòng)來(lái)確認(rèn)工作規(guī)范